Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2007/132588
Kind Code:
A1
Abstract:
[PROBLEMS] To provide an acceleration sensor in which an unwanted output due
to the pyroelectric effect in the region held by a holding member is prevented.
[MEANS FOR SOLVING PROBLEMS] An acceleration sensor (1A) comprises a sensing
element (2) having a multilayer body composed of piezoelectric ceramic layers
(2a to 2d) and a pair of holding members (10, 11) holding a major surface at an end
in the length direction of the sensing element (2). The sensing element (2) has
electrodes (3 to 7) at the interlayers and major surfaces of the ceramic layers.
By applying acceleration, a voltage or charge produced in the sensing element
(2) is taken out of the major surface electrodes (6, 7) and the interlayer electrodes
(4, 5). Within the region held by the holding members (10, 11) of the sensing element
(2), regions (S) of the piezoelectric ceramic layers (2a, 2d) interposed between
the major surface electrodes (6, 7) and the interlayer electrodes (4, 5) are not
polarized.
Inventors:
EIMORI TAKESHI (JP)
TABOTA JUN (JP)
TABOTA JUN (JP)
Application Number:
PCT/JP2007/054934
Publication Date:
November 22, 2007
Filing Date:
March 13, 2007
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
EIMORI TAKESHI (JP)
TABOTA JUN (JP)
EIMORI TAKESHI (JP)
TABOTA JUN (JP)
International Classes:
G01P15/09; H01L41/08
Foreign References:
| JP2005164505A | 2005-06-23 | |||
| JP2003337140A | 2003-11-28 | |||
| JPH01232267A | 1989-09-18 |
Attorney, Agent or Firm:
TSUTSUI, Hidetaka (2-5 Omiya-cho 7-chome,,Nara-shi, Nara15, JP)
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