ACCELERATION SENSOR - MURATA MANUFACTURING CO

Title:

ACCELERATION SENSOR

Document Type and Number:

WIPO Patent Application WO/2007/141944

Kind Code:

A1

Abstract:

An acceleration sensor (1) has a frame-shaped beam (4) placed in a manner floating over an XY board surface of a base (2), a beam support/fixation section for supporting the beam (4) at the base (2) through support sections (5a, 5b) in a manner like a beam supported at both ends, a weight section (7) placed in a manner floating over the XY board surface of the base (2), and a connection section (8) for supporting the weight (7) at the beam (4) in a cantilever manner. Deflecting deformation of the frame-shaped beam (4) enables the weight (7) to be displaced in the directions of the three axes that are the X-axis direction, the Y-axis direction, and the Z-axis direction. On the beam (4) are provided a section for detecting acceleration in the X-axis direction, a section for detecting acceleration in the Y-axis direction, and a section for detecting acceleration in the Z axis direction. At portions (4a, 4b) extended in the Y-axis direction, the section for detecting acceleration in the Z-axis direction is provided on the base end side of the extension and the section for detecting acceleration in the Y-axis direction is provided on the forward end side.

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Inventors:

MOCHIDA YOICHI (JP)

Application Number:

PCT/JP2007/054201

Publication Date:

December 13, 2007

Filing Date:

March 05, 2007

Export Citation:

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Assignee:

MURATA MANUFACTURING CO (JP)
MOCHIDA YOICHI (JP)

International Classes:

G01P15/12; G01P15/18; H01L29/84

Foreign References:

JPH06130083A	1994-05-13
JPH06163937A	1994-06-10
JPH09269335A	1997-10-14
JPH11337571A	1999-12-10
JP2007043017A	2007-02-15
JP2002296293A	2002-10-09

Other References: