Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2008/038537
Kind Code:
A1
Abstract:
Provided is a piezoresistance element type acceleration sensor wherein an offset
voltage does not fluctuate even when excessive shock/acceleration is operated.
In the acceleration sensor, a flexible portion and a metal wiring on a spindle
upper surface are arranged in a groove formed on the flexible portion upper surface/spindle
upper surface. Thus, the acceleration sensor has the structure wherein the
metal wiring does not hit an upper regulating board even when the spindle hits
the upper regulating board, and the offset voltage fluctuation can be eliminated.
Inventors:
HATANO HIROYUKI (JP)
MIENO ATSUSHI (JP)
SAITOH MASAKATSU (JP)
IKEDA YOSHIO (JP)
MIENO ATSUSHI (JP)
SAITOH MASAKATSU (JP)
IKEDA YOSHIO (JP)
Application Number:
PCT/JP2007/068048
Publication Date:
April 03, 2008
Filing Date:
September 18, 2007
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
HATANO HIROYUKI (JP)
MIENO ATSUSHI (JP)
SAITOH MASAKATSU (JP)
IKEDA YOSHIO (JP)
HATANO HIROYUKI (JP)
MIENO ATSUSHI (JP)
SAITOH MASAKATSU (JP)
IKEDA YOSHIO (JP)
International Classes:
G01P15/12; G01P15/18
Foreign References:
| JP2005127745A | 2005-05-19 | |||
| JPH07273351A | 1995-10-20 | |||
| JP2003092413A | 2003-03-28 |
Attorney, Agent or Firm:
MORITA, Hiroshi (Sankyo Central Plaza Building 5F11-8, Nishi-Nippori 5-chome,Arakawa-k, Tokyo 13, JP)
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