Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2009/125510
Kind Code:
A9
Abstract:
An acceleration sensor is provided with a substrate (1), first and second twisted beams (11, 12), first and second detection frames (21, 22), first and second detection electrodes (41, 42), first and second link beams (31, 32), and an inertial mass body (2). The first and second twisted beams (11, 12) are twisted around first and second twist axis (T2, T2). The first and second detection frames (21, 22) rotate with the first and second twist axis (T1, T2) at the center. The first and second detection electrodes (41, 42) detect angles of the first and second detection frames (21, 22) with respect to the substrate (1). The first link beam (31) is on the first axis (L1), which is obtained by shifting the first twist axis (T1) to the side of one end of the first detection frame (21) along the direction that intersects with the first twist axis (T1). The second link beam (32) is on a second axis (L2), which is obtained by shifting the second shift axis (T2) in the direction identical to the direction wherein the first twist axis (T1) is shifted.
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Inventors:
KONNO NOBUAKI (JP)
Application Number:
PCT/JP2008/069522
Publication Date:
September 02, 2010
Filing Date:
October 28, 2008
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
KONNO NOBUAKI (JP)
KONNO NOBUAKI (JP)
International Classes:
G01P15/125; H01L29/84
Attorney, Agent or Firm:
FUKAMI, Hisao et al. (JP)
Hisao Fukami (JP)
Hisao Fukami (JP)
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