ACCELERATION SENSOR - PANASONIC ELEC WORKS CO LTD

Title:

ACCELERATION SENSOR

Document Type and Number:

WIPO Patent Application WO/2010/061777

Kind Code:

A1

Abstract:

An acceleration sensor is provided with: a rectangular movable electrode (4, 5); a pair of beams (6a, 6b, 7a, 7b), which are connected to the center of facing two sides of the movable electrode (4, 5) and swingably support the movable electrode (4, 5); and first and second fixed electrodes (20a, 20b, 21a, 21b) which are respectively provided on one side and the other side of a boundary line by having the straight line connecting the pair of beams (6a, 6b, 7a, 7b) as the boundary line, and are arranged to face the front surface of the movable electrode (4, 5) with a predetermined interval therebetween. On the rear surface of the movable electrode (4, 5), first and second recessed sections (11a, 11b, 11c, 11d, 13a, 13b, 13c, 13d, 12, 14) are formed on said side and the other side of the boundary line, respectively.

Inventors:

YOSHIDA HITOSHI (JP)
SUZUKI YUJI (JP)
IBARA NOBUYUKI (JP)
UEDA HIDEKI (JP)
OKADA TAKESHI (JP)

Application Number:

PCT/JP2009/069631

Publication Date:

June 03, 2010

Filing Date:

November 19, 2009

Export Citation:

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Assignee:

PANASONIC ELEC WORKS CO LTD (JP)
YOSHIDA HITOSHI (JP)
SUZUKI YUJI (JP)
IBARA NOBUYUKI (JP)
UEDA HIDEKI (JP)
OKADA TAKESHI (JP)

International Classes:

G01P15/125; G01P15/18; H01L29/84

Foreign References:

JPS6429775A	1989-01-31
US20070000323A1	2007-01-04
JP2007298405A	2007-11-15
JP2000187041A	2000-07-04
JPS6459161A	1989-03-06
US20070000323A1	2007-01-04
JP2008299989A	2008-12-11
JP2008300004A	2008-12-11

Other References: