Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2011/064642
Kind Code:
A3
Abstract:
Disclosed is an acceleration sensor provided with sensor sections comprising: a weight section which is integrally formed from a concave section which opens on one surface of the acceleration sensor, and a solid section which does not include the concave section; a pair of beam sections which rotatably support the weight section so that the concave section and the solid section are aligned along the rotational axis of the weight section; a movable electrode provided across the concave section and the solid section on the opposite surface to the surface on which the concave section opens; a first fixed electrode which is disposed in the position where the movable electrode opposes the convex section side; and a second fixed electrode which is disposed in the position where the movable electrode opposes the solid section side. The acceleration sensor detects acceleration from the change in capacitance between the fixed electrodes and the movable electrode which follows the rotation of the weight section which has the rotational axis along the direct line connecting the beam sections. The acceleration sensor is characterized in that the beam sections are disposed offset on the concave section side in such a way that the angle formed between a perpendicular dropped from the centre of gravity of the weight section to the surface of the movable electrode is approximately 45 degrees.
Inventors:
YOSIDA HITOSHI (JP)
IBARA NOBUYUKI (JP)
UEDA HIDEKI (JP)
OKADA TAKESHI (JP)
MORI TAKESHI (JP)
NOMURA MASATOSI (JP)
KAKIMOTO KATUMI (JP)
SUZUKI YUJI (JP)
IBARA NOBUYUKI (JP)
UEDA HIDEKI (JP)
OKADA TAKESHI (JP)
MORI TAKESHI (JP)
NOMURA MASATOSI (JP)
KAKIMOTO KATUMI (JP)
SUZUKI YUJI (JP)
Application Number:
PCT/IB2010/002975
Publication Date:
July 21, 2011
Filing Date:
November 23, 2010
Export Citation:
Assignee:
PANASONIC ELEC WORKS CO LTD (JP)
YOSIDA HITOSHI (JP)
IBARA NOBUYUKI (JP)
UEDA HIDEKI (JP)
OKADA TAKESHI (JP)
MORI TAKESHI (JP)
NOMURA MASATOSI (JP)
KAKIMOTO KATUMI (JP)
SUZUKI YUJI (JP)
YOSIDA HITOSHI (JP)
IBARA NOBUYUKI (JP)
UEDA HIDEKI (JP)
OKADA TAKESHI (JP)
MORI TAKESHI (JP)
NOMURA MASATOSI (JP)
KAKIMOTO KATUMI (JP)
SUZUKI YUJI (JP)
International Classes:
G01P15/125; G01P15/08; G01P15/18; H01L29/84
Domestic Patent References:
| WO2009020716A1 | 2009-02-12 | |||
| WO2010061777A1 | 2010-06-03 |
Foreign References:
| JP2008544243A | 2008-12-04 | |||
| JPS6459161A | 1989-03-06 | |||
| JP2007298405A | 2007-11-15 | |||
| JP2006519387A | 2006-08-24 | |||
| JP2006133245A | 2006-05-25 | |||
| JPH05172846A | 1993-07-13 | |||
| JP2002539460A | 2002-11-19 |
Other References:
See also references of EP 2506018A4
Attorney, Agent or Firm:
JANG, Seong Ku (Trust Tower275-7 Yangjae-dong,Seocho-gu, Seoul 137-130, KR)
Download PDF:
Claims: