ACCELERATION SENSOR

WIPO Patent Application WO/2011/155506

A1

Disclosed is an acceleration sensor wherein shock resistance is improved without changing the sensitivity and resonance frequency of the sensor. A beam section (31) has the base edge side thereof connected to a supporting section (30), and the leading edge side thereof connected to a weight section (34). The beam section (31) has a cross-section formed in a T-shape, and piezoresistors (R1-R4) are formed on the upper surface of the beam section (31). The weight section (34) is connected to the leading edge of the beam section (31), and is positioned inside of the supporting section (30). A substantially C-shaped groove (33) that surrounds the weight section (34) is provided between the weight section (34) and the supporting section (30). Furthermore, the weight section (34) has an extending portion (36) formed by having a surface layer (91) edge on the beam section (31) side extending to the beam section (31) side from a supporting substrate layer (93) edge on the beam section (31) side. Therefore, when a shock is applied, and acceleration in the X direction is operated, maximum stress is dispersed to the beam section (31) side from the boundary between the beam section (31) and the weight section (34).

KONISHI TAKAHIRO (JP)
YOSHIDA KAZUHIRO (JP)

PCT/JP2011/063099

December 15, 2011

June 08, 2011

Click for automatic bibliography generation  

MURATA MANUFACTURING CO (JP)
KONISHI TAKAHIRO (JP)
YOSHIDA KAZUHIRO (JP)

G01P15/12; H01L29/84

JPH08160066A	1996-06-21
JP2008172011A	2008-07-24
JPH06294813A	1994-10-21
JP2010085143A	2010-04-15

Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)

View/Download PDF      PDF Help

Previous Patent: MANUFACTURING METHOD FOR POLYPHENOL COMPOSITION

Next Patent: ORGANIC ELECTROLUMINESCENCE ELEMENT