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Patent Searching and Data


Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2011/161917
Kind Code:
A1
Abstract:
The disclosed acceleration sensor comprises a frame, a mass, a beam that connects the mass to the frame, and a detection unit that detects deflection of the beam. The detection unit comprises: a first contact part and second contact part provided on top of the mass; and a strain-resistance part, one end of which is connected to the first contact part and the other end of which is connected to the second contact part. The strain-resistance part is formed in a meander pattern, from a strain-resistance thin film comprising a metal oxide, in the section of the beam that is closer to the mass than to the frame.

Inventors:
IMANAKA, Takashi (())
Application Number:
JP2011/003466
Publication Date:
December 29, 2011
Filing Date:
June 17, 2011
Export Citation:
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Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真1006番地 Osaka, 〒5718501, JP)
International Classes:
G01P15/12; B81B3/00; G01P15/18; H01L29/84
Domestic Patent References:
2008-04-03
Foreign References:
JP2009243915A2009-10-22
JPH0961453A1997-03-07
JPH0918070A1997-01-17
JP2007085800A2007-04-05
JP2008224294A2008-09-25
Other References:
See also references of EP 2495572A1
Attorney, Agent or Firm:
NAITO, Hiroki et al. (1006 Oaza Kadoma, Kadoma-sh, Osaka 01, 〒5718501, JP)
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Claims: