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Patent Searching and Data

Document Type and Number:
WIPO Patent Application WO/2011/161917
Kind Code:
The disclosed acceleration sensor comprises a frame, a mass, a beam that connects the mass to the frame, and a detection unit that detects deflection of the beam. The detection unit comprises: a first contact part and second contact part provided on top of the mass; and a strain-resistance part, one end of which is connected to the first contact part and the other end of which is connected to the second contact part. The strain-resistance part is formed in a meander pattern, from a strain-resistance thin film comprising a metal oxide, in the section of the beam that is closer to the mass than to the frame.

IMANAKA, Takashi (())
Application Number:
Publication Date:
December 29, 2011
Filing Date:
June 17, 2011
Export Citation:
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PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真1006番地 Osaka, 〒5718501, JP)
International Classes:
G01P15/12; B81B3/00; G01P15/18; H01L29/84
Attorney, Agent or Firm:
NAITO, Hiroki et al. (1006 Oaza Kadoma, Kadoma-sh, Osaka 01, 〒5718501, JP)
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