Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/086285
Kind Code:
A1
Abstract:
Provided is an acceleration sensor, which has acceleration detection accuracy not easily deteriorated even if an ambient temperature is changed, and which can be easily manufactured.
A piezoelectric substrate (11) includes a polarized center portion (11A), a first end portion (11B), and a second end portion (11C). A first electrode (12a) is formed on the main surface (11a) of the piezoelectric substrate (11) such that the first electrode extends from the first end portion (11B) to the second end portion (11C). A second electrode (13a) is formed inside of the piezoelectric substrate (11) such that the second electrode extends over the second end portion (11C) and the center portion (11A). The second electrode (13a) faces the first electrode (12a) in the thickness direction in the center portion (11A). A supporting member (30) sandwiches the second end portion (11C). The piezoelectric substrate (11) is configured such that the distance between the first electrode (12a) and the second electrode (13a) in the second end portion (11C) is larger than the distance between the first electrode (12a) and the second electrode (13a) in the center portion (11A).
Inventors:
KUBOKI TAKAMASA (JP)
Application Number:
PCT/JP2011/072516
Publication Date:
June 28, 2012
Filing Date:
September 30, 2011
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
KUBOKI TAKAMASA (JP)
KUBOKI TAKAMASA (JP)
International Classes:
G01P15/09; H01L41/08
Foreign References:
JP2005164505A | 2005-06-23 | |||
JP2003337140A | 2003-11-28 | |||
JPH11183510A | 1999-07-09 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
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