Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/073163
Kind Code:
A1
Abstract:
An acceleration sensor with an acceleration sensor unit that is unaffected by changes in the surrounding environment is provided. The acceleration sensor unit (26), in which a movable electrode (11) and fixed electrodes (13xa, 13xb, 14ya, 14yb, 24) are formed, is formed on a silicon substrate (2). The top and bottom of the silicon substrate (2) are covered by an upper substrate (21) and a lower substrate (22) in such a manner as to allow the movable electrode to move. A linking part (25), which links a space (23) facing the acceleration sensor unit to the outside, is formed on the upper substrate and/or the lower substrate.
Inventors:
SAKAUE SATORU (JP)
YAO HIRONOBU (JP)
KISHIRO MASAMI (JP)
YAO HIRONOBU (JP)
KISHIRO MASAMI (JP)
Application Number:
PCT/JP2012/007258
Publication Date:
May 23, 2013
Filing Date:
November 12, 2012
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD (JP)
International Classes:
G01P15/125; G01P15/08; G01P15/18; H01L29/84
Foreign References:
| JP2006162354A | 2006-06-22 | |||
| JP2009216693A | 2009-09-24 | |||
| JPH09243654A | 1997-09-19 |
Attorney, Agent or Firm:
HIROSE, Hajime et al. (JP)
Hirose 1 (JP)
Hirose 1 (JP)
Download PDF:
Claims: