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Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/080424
Kind Code:
A1
Abstract:
This acceleration sensor has: first and second anchors (17, 18), which are on the substrate (11); a first weight section (19), which is supported by means of the first anchor (17); a first electrode (20) extending from the first weight section (19); a second electrode (23) supported by means of the second anchor (18); and a first beam (21), which connects the first weight section (19) and the first anchor (17) to each other. The first weight section (19) is configured of a first left portion (24) and a first right portion (25), which have different weights. The first beam (21) has; a first connecting beam (26), which connects the first left portion (24) and the first right portion (25) to each other; and a first supporting beam (27) which connects the first connecting beam (26) and the first anchor (17) to each other. When acceleration is applied, the first left portion (24) and the first right portion (25) can move in the directions opposite to each other in a seesaw-like manner with the first anchor (17) as a supporting point.

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Inventors:
SAKAI MINEKAZU (JP)
Application Number:
PCT/JP2012/006654
Publication Date:
June 06, 2013
Filing Date:
October 18, 2012
Export Citation:
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Assignee:
DENSO CORP (JP)
International Classes:
G01P15/125; H01L29/84
Foreign References:
JP2011022137A2011-02-03
JP2006266873A2006-10-05
JP2008531991A2008-08-14
JP2010066231A2010-03-25
Attorney, Agent or Firm:
KIN, Junhi (JP)
Gold Junki (JP)
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Claims:



 
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