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Patent Searching and Data


Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/089079
Kind Code:
A1
Abstract:
Provided is a small and high-sensitivity acceleration sensor for the cases of having, as the detection direction, a direction tilted with respect to one axis, and for the cases of having, as the detection directions, two axis directions. An acceleration sensor (10) is provided with: a weight (11); a supporting section (12) disposed to face the weight (11); beams (13A, 13B), which have flexibility, and respectively connect the weight (11) and the supporting section (12) to each other; and piezoresistive elements (14A, 14B), which are respectively provided in the beams (13A, 13B). The weight (11) swings like a pendulum with the center portions of the beams (13A, 13B) as supporting points.

Inventors:
HAMAMURA HIROSHI (JP)
Application Number:
JP2012/082005
Publication Date:
June 20, 2013
Filing Date:
December 11, 2012
Export Citation:
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Assignee:
MURATA MANUFACTURING CO., LTD. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
International Classes:
G01P15/12; G01P15/18
Foreign References:
JPH10177033A
JPH05333052A
JP2007171056A
JPH09505396A
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (1-4-34, Noninbashi Chuo-ku, Osaka-sh, Osaka 11, 〒5400011, JP)
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Claims: