Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/089079
Kind Code:
A1
Abstract:
Provided is a small and high-sensitivity acceleration sensor for the cases of having, as the detection direction, a direction tilted with respect to one axis, and for the cases of having, as the detection directions, two axis directions. An acceleration sensor (10) is provided with: a weight (11); a supporting section (12) disposed to face the weight (11); beams (13A, 13B), which have flexibility, and respectively connect the weight (11) and the supporting section (12) to each other; and piezoresistive elements (14A, 14B), which are respectively provided in the beams (13A, 13B). The weight (11) swings like a pendulum with the center portions of the beams (13A, 13B) as supporting points.
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Inventors:
HAMAMURA HIROSHI (JP)
Application Number:
PCT/JP2012/082005
Publication Date:
June 20, 2013
Filing Date:
December 11, 2012
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01P15/12; G01P15/18
Foreign References:
| JPH10177033A | 1998-06-30 | |||
| JPH05333052A | 1993-12-17 | |||
| JP2007171056A | 2007-07-05 | |||
| JPH09505396A | 1997-05-27 |
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
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