Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/161597
Kind Code:
A1
Abstract:
This acceleration sensor (10) is provided with: a frame-shaped affixed section (12) of which the outer shape is a rectangle; a plumb section (14) that has an approximately square shape having, in a plan view, two sides opposite each other and parallel to the x-axis direction and two sides opposite each other and parallel to the y-axis direction, and that has a notch section (15) provided along a direction forming a 45° angle with respect to the x-axis direction and the y-axis direction; a vibrating beam (13) that is provided linearly in a plan view along a direction forming a 45° angle with respect to the x-axis direction and the y-axis direction, has one end connected to the affixed section (12), has the other end connected to the plumb section (14), has a portion thereof disposed within the notch section (15), and supports the plumb section (14) in a manner so as to be able to displace in the z-axis direction; a drive unit (19A) that is provided to the vibrating beam (13) and that vibrates the vibrating beam (13); and a detection unit (19B) that is provided to the vibrating beam (13) and that outputs a detection signal that changes in accordance with the deformation of the vibrating beam (13).
Inventors:
HADA TAKUO (JP)
FUJIMOTO KATSUMI (JP)
HORIUCHI HIDEYA (JP)
YONEDA TOSHIMARO (JP)
FUJIMOTO KATSUMI (JP)
HORIUCHI HIDEYA (JP)
YONEDA TOSHIMARO (JP)
Application Number:
PCT/JP2013/061147
Publication Date:
October 31, 2013
Filing Date:
April 15, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01P15/09; G01P15/10; H01L41/08; H01L41/18
Foreign References:
| JPH09211020A | 1997-08-15 | |||
| JP2005249446A | 2005-09-15 | |||
| JP2000206141A | 2000-07-28 | |||
| JP2000180466A | 2000-06-30 | |||
| JP2006308291A | 2006-11-09 | |||
| JP2010014406A | 2010-01-21 |
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
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