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Patent Searching and Data


Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/161598
Kind Code:
A1
Abstract:
In the present invention, a plumb section (14) has two sides opposite in the x-axis direction in a plan view. A vibrating beam (13) has one end connected in one location to an affixed section (12), has another end connected in one location to one of the two sides of the plumb section (14) opposite in the x-axis direction in a plan view, and supports the plumb section (14) in a manner so as to be able to displace in the x-axis direction. A holding beam (15) has one end connected in one location to the affixed section (12), another end connected in one location to the other of the two sides of the plumb section (14) opposite in the x-axis direction in a plan view, and supports the plumb section (14) in a manner so as to be able to displace in the x-axis direction. A drive unit (21) is provided to the vibrating beam (13), and causes the vibrating beam (13) to vibrate. A detection unit (31) is provided to the vibrating beam (13) and outputs a detection signal that changes in accordance with the deformation of the vibrating beam (13).

Inventors:
HADA, Takuo (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
FUJIMOTO, Katsumi (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
HORIUCHI, Hideya (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
YONEDA, Toshimaro (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
Application Number:
JP2013/061149
Publication Date:
October 31, 2013
Filing Date:
April 15, 2013
Export Citation:
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Assignee:
MURATA MANUFACTURING CO., LTD. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
International Classes:
G01P15/09; G01P15/10; H01L41/08; H01L41/09; H01L41/187
Domestic Patent References:
2010-12-16
Foreign References:
JP2006308291A2006-11-09
JPH09257830A1997-10-03
JP2009265362A2009-11-12
JPS53132988A1978-11-20
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (1-4-34, Noninbashi Chuo-ku, Osaka-sh, Osaka 11, 〒5400011, JP)
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