Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/057623
Kind Code:
A1
Abstract:
This acceleration sensor is characterized in having disposed in one chip: an X detecting section (10), which detects acceleration in the X direction by swinging a first movable electrode (11) with a pair of beam sections (12a, 12b) as axis; a Y detecting section (20), which detects acceleration in the Y direction by swinging a second movable electrode (21) with a pair of beam sections (22a, 22b) as axis; and a Z detecting section (30), which detects acceleration in the Z direction by moving a third movable electrode (31) in parallel in the perpendicular direction, said third movable electrode being held by means of two pairs of beam sections (32a, 32b, 32c, 32d).
Inventors:
KISHIMOTO SHINICHI
UEDA HIDEKI
TAURA TAKUMI
YOSHIDA HITOSHI
MORI TAKESHI
IBARA NOBUYUKI
GODA KAZUO
UEDA HIDEKI
TAURA TAKUMI
YOSHIDA HITOSHI
MORI TAKESHI
IBARA NOBUYUKI
GODA KAZUO
Application Number:
PCT/JP2013/005759
Publication Date:
April 17, 2014
Filing Date:
September 27, 2013
Export Citation:
Assignee:
PANASONIC CORP (JP)
International Classes:
G01P15/08; G01P15/18; G01P15/125; H01L29/84
Domestic Patent References:
| WO2009090841A1 | 2009-07-23 | |||
| WO2010032818A1 | 2010-03-25 | |||
| WO2010032818A1 | 2010-03-25 |
Foreign References:
| JPH1151967A | 1999-02-26 | |||
| JP2010066231A | 2010-03-25 | |||
| JPH09113534A | 1997-05-02 | |||
| JP2004361115A | 2004-12-24 |
Other References:
See also references of EP 2908141A4
Attorney, Agent or Firm:
ITO, Masakazu et al. (JP)
Masakazu Ito (JP)
Masakazu Ito (JP)
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