Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2016/075761
Kind Code:
A1
Abstract:
An acceleration sensor (1) has: a fixed section (33); a movable section (31) connected to the fixed section (33); a lower electrode (11) disposed to face the lower surface of the movable section (31); and an upper electrode (21) disposed to face the upper surface of the movable section (31). The distance in the x axis direction between the fixed section (33) and an end section (41) of the lower electrode (11) is shorter than the distance in the x axis direction between the fixed section (33) and an end section (51) of the upper electrode (21). Furthermore, the distance in the x axis direction between the fixed section (33) and an end section (42) of the lower electrode (11) is shorter than the distance in the x axis direction between the fixed section (33) and an end section (52) of the upper electrode (21).
Inventors:
ISOBE ATSUSHI (JP)
SAKUMA NORIYUKI (JP)
TAKUBO CHISAKI (JP)
KAMADA YUUDAI (JP)
SHIOTA TAKASHI (JP)
SAKUMA NORIYUKI (JP)
TAKUBO CHISAKI (JP)
KAMADA YUUDAI (JP)
SHIOTA TAKASHI (JP)
Application Number:
PCT/JP2014/079895
Publication Date:
May 19, 2016
Filing Date:
November 11, 2014
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
G01P15/125; G01P15/08
Foreign References:
| JP2013519880A | 2013-05-30 | |||
| US20130319117A1 | 2013-12-05 | |||
| JP2010517014A | 2010-05-20 | |||
| JPH1022514A | 1998-01-23 | |||
| JP2013040856A | 2013-02-28 | |||
| JP2008513800A | 2008-05-01 |
Attorney, Agent or Firm:
TSUTSUI, YAMATO (JP)
Tsutsui Daiwa (JP)
Tsutsui Daiwa (JP)
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