Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/183082
Kind Code:
A1
Abstract:
Provided is an acceleration sensor having high sensitivity, low power consumption, and high linearity of output with respect to an applied acceleration under gravity. In order to solve the problem addressed by the present invention, the acceleration sensor according to the present invention has a movable part for rotating about a rotational axis between a base substrate and a cap substrate, a left capacitor being configured from a left upper electrode provided to the cap substrate and a left movable electrode provided to the movable part, and a right capacitor being configured from a right upper electrode provided to the cap substrate and a right movable electrode provided to the movable part. The left-right-direction width of a first detection region for detecting a capacitance between the left upper electrode and the left movable electrode and the left-right-direction width of a second detection region for detecting a capacitance between the right upper electrode and the right movable electrode are different from each other.
Inventors:
ISOBE ATSUSHI (JP)
SHIOTA TAKASHI (JP)
KAMADA YUUDAI (JP)
TAKUBO CHISAKI (JP)
SAKUMA NORIYUKI (JP)
SHIOTA TAKASHI (JP)
KAMADA YUUDAI (JP)
TAKUBO CHISAKI (JP)
SAKUMA NORIYUKI (JP)
Application Number:
PCT/JP2016/062264
Publication Date:
October 26, 2017
Filing Date:
April 18, 2016
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
G01P15/125; G01P15/08
Foreign References:
| JP2012141160A | 2012-07-26 | |||
| JP2013217772A | 2013-10-24 | |||
| JP2009537803A | 2009-10-29 | |||
| JP2013519880A | 2013-05-30 | |||
| US20110023604A1 | 2011-02-03 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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