Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/188653
Kind Code:
A1
Abstract:
An acceleration sensor according to the present invention comprises: a device-side substrate that has a first main surface and a second main surface opposite of the first main surface; a recess that is indented from the first main surface toward the second main surface side; an MEMS electrode that is provided in the recess, that includes fixed electrodes including a first fixed electrode and a second fixed electrode electrically insulated from the first fixed electrode, that includes movable electrodes including a first movable electrode and a second movable electrode electrically insulated from the first movable electrode, and that forms a differential circuit; and an isolation joint that mechanically couples the first movable electrode and the second movable electrode while electrically insulating the same.
Inventors:
HELLER MARTIN WILFRIED (JP)
FUJITA TOMA (JP)
FUJITA TOMA (JP)
Application Number:
PCT/JP2022/048219
Publication Date:
October 05, 2023
Filing Date:
December 27, 2022
Export Citation:
Assignee:
ROHM CO LTD (JP)
International Classes:
G01P15/08; G01P15/125; H01L29/84
Foreign References:
| CN107132372A | 2017-09-05 | |||
| JP2019049434A | 2019-03-28 | |||
| JP2020046191A | 2020-03-26 | |||
| JP2019100760A | 2019-06-24 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
Download PDF:
Previous Patent: RECORDING METHOD, RECORDING DEVICE, AND PROGRAM
Next Patent: DIGITAL PHASE SHIFTING CIRCUIT AND DIGITAL PHASE SHIFTER
Next Patent: DIGITAL PHASE SHIFTING CIRCUIT AND DIGITAL PHASE SHIFTER