Title:
ACCELERATION SWITCH AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/108559
Kind Code:
A1
Abstract:
An acceleration switch is provided with a mass body that has a vacant space therein; an arc-shaped beam that supports the mass body, and that is arranged so as to surround the mass body; a supporting section that is arranged around the mass body in a state of having the beam secured; and an opposing electrode that exists within the vacant space inside the mass body, and detects any contact with the mass body. There is one beam that supports the mass body, and the distance between the inner side-face of the mass body and the outer side-face of the opposing electrode, which is the inter-electrode distance, is 1 μm to 20 μm inclusive.
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Inventors:
SHIMODA, Sadashi (8 Nakase 1-chome, Mihama-ku, Chiba-sh, Chiba 07, 〒2618507, JP)
下田 貞之 (〒07 千葉県千葉市美浜区中瀬１丁目８番地 セイコーインスツル株式会社内 Chiba, 〒2618507, JP)
下田 貞之 (〒07 千葉県千葉市美浜区中瀬１丁目８番地 セイコーインスツル株式会社内 Chiba, 〒2618507, JP)
Application Number:
JP2011/054682
Publication Date:
September 09, 2011
Filing Date:
March 02, 2011
Export Citation:
Assignee:
SEIKO INSTRUMENTS INC. (8 Nakase 1-chome, Mihama-ku Chiba-sh, Chiba 07, 〒2618507, JP)
セイコーインスツル株式会社 (〒07 千葉県千葉市美浜区中瀬１丁目８番地 Chiba, 〒2618507, JP)
JAPAN MEMS CO., LTD (Mio-Kitaurawa Bldg. 2-9-16, Motocho Urawa-ku, Saitama-sh, Saitama 73, 〒3300073, JP)
日本ＭＥＭＳ株式会社 (〒73 埼玉県さいたま市浦和区元町２－９－１６ミオ北浦和ビル Saitama, 〒3300073, JP)
セイコーインスツル株式会社 (〒07 千葉県千葉市美浜区中瀬１丁目８番地 Chiba, 〒2618507, JP)
JAPAN MEMS CO., LTD (Mio-Kitaurawa Bldg. 2-9-16, Motocho Urawa-ku, Saitama-sh, Saitama 73, 〒3300073, JP)
日本ＭＥＭＳ株式会社 (〒73 埼玉県さいたま市浦和区元町２－９－１６ミオ北浦和ビル Saitama, 〒3300073, JP)
International Classes:
H01H35/14
Attorney, Agent or Firm:
KUHARA, Kentaro et al. (8 Nakase 1-chome,Mihama-ku, Chiba-shi, Chiba 07, 〒2618507, JP)
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Claims: