Title:
ACID-DISSOCIATIVE GROUP-CONTAINING COMPOUND AND RADIATION-SENSITIVE COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2007/094436
Kind Code:
A1
Abstract:
This invention provides a radiation-sensitive composition that can form a resist film which is effectively sensitive to electron beams or extreme ultraviolet light, is excellent in roughness, etching resistance, and sensitivity, and can form a fine pattern in a highly accurate and stable manner. The radiation-sensitive composition comprises (a) an acid-dissociative group-containing compound for use in resist film formation, obtained by substituting, by an acid-dissociative group, at least one of hydroxyl groups in a precursor compound containing 2 to 5 hydroxyl groups and 2 to 5 aromatic rings and having a weight average molecular weight of 290 to 600 as measured by gel permeation chromatography (GPC) using a polystyrene standard, and (b) a radiation-sensitive acid generator which generates acid upon radiation irradiation.
Inventors:
SHIMIZU, Daisuke (6-10 Tsukiji 5-chome, Chuo-k, Tokyo 10, 1048410, JP)
清水 大輔 (〒10 東京都中央区築地五丁目６番１０号 ＪＳＲ株式会社内 Tokyo, 1048410, JP)
KAI, Toshiyuki (6-10 Tsukiji 5-chome, Chuo-k, Tokyo 10, 1048410, JP)
甲斐 敏之 (〒10 東京都中央区築地五丁目６番１０号 ＪＳＲ株式会社内 Tokyo, 1048410, JP)
清水 大輔 (〒10 東京都中央区築地五丁目６番１０号 ＪＳＲ株式会社内 Tokyo, 1048410, JP)
KAI, Toshiyuki (6-10 Tsukiji 5-chome, Chuo-k, Tokyo 10, 1048410, JP)
甲斐 敏之 (〒10 東京都中央区築地五丁目６番１０号 ＪＳＲ株式会社内 Tokyo, 1048410, JP)
Application Number:
JP2007/052784
Publication Date:
August 23, 2007
Filing Date:
February 15, 2007
Export Citation:
Assignee:
JSR CORPORATION (6-10, Tsukiji 5-chome Chuo-k, Tokyo 10, 1048410, JP)
ＪＳＲ株式会社 (〒10 東京都中央区築地五丁目６番１０号 Tokyo, 1048410, JP)
SHIMIZU, Daisuke (6-10 Tsukiji 5-chome, Chuo-k, Tokyo 10, 1048410, JP)
清水 大輔 (〒10 東京都中央区築地五丁目６番１０号 ＪＳＲ株式会社内 Tokyo, 1048410, JP)
KAI, Toshiyuki (6-10 Tsukiji 5-chome, Chuo-k, Tokyo 10, 1048410, JP)
ＪＳＲ株式会社 (〒10 東京都中央区築地五丁目６番１０号 Tokyo, 1048410, JP)
SHIMIZU, Daisuke (6-10 Tsukiji 5-chome, Chuo-k, Tokyo 10, 1048410, JP)
清水 大輔 (〒10 東京都中央区築地五丁目６番１０号 ＪＳＲ株式会社内 Tokyo, 1048410, JP)
KAI, Toshiyuki (6-10 Tsukiji 5-chome, Chuo-k, Tokyo 10, 1048410, JP)
International Classes:
C07C43/23; C07C69/734; C07C69/96; G03F7/004; G03F7/039; H01L21/027; C07C43/00; C07C69/00; G03F7/004; G03F7/039; H01L21/02
Attorney, Agent or Firm:
WATANABE, Kazuhira (3rd Fl, No.8 Kikuboshi Tower Building 20-18, Asakusabashi 3-chom, Taito-ku Tokyo, 111-0053, JP)
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