Title:
ACOUSTIC FOREIGN MATTER REMOVAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/026421
Kind Code:
A1
Abstract:
The present invention comprises a stage (10), an acoustic head (20), and a movement mechanism (30), wherein: the acoustic head (20) has a plurality of ultrasonic speakers (21) and a casing (22); a plurality of ultrasonic waves (24) generated from the plurality of ultrasonic speakers (21) are concentrated in a gap (14) between the casing (22) and a holding surface (10a) of the stage (10) to form a low pressure region (40); and foreign matter (90) adhering to a surface (15) of an electronic component (13) is sucked into the low pressure region (40) to remove the foreign matter (90) from the surface (15).
Inventors:
KIRKBY MICHAEL (JP)
LANDAEZ GARCIA YSMALDO JOSE (JP)
MUNAKATA HIROSHI (JP)
LANDAEZ GARCIA YSMALDO JOSE (JP)
MUNAKATA HIROSHI (JP)
Application Number:
PCT/JP2021/031273
Publication Date:
March 02, 2023
Filing Date:
August 26, 2021
Export Citation:
Assignee:
YAMAHA ROBOTICS HOLDINGS CO LTD (JP)
International Classes:
B08B7/00
Foreign References:
| JP2012217876A | 2012-11-12 | |||
| CN111889342A | 2020-11-06 |
Other References:
HOSHI, TAKAYUKI: "Could not help making Do-It-Yourself acoustic levitation device (2nd report)", IPSJ ENTERTAINMENT COMPUTING SYMPOSIUM (EC2015), INFORMATION PROCESSING SOCIETY OF JAPAN, 18 September 2015 (2015-09-18), pages 100 - 106, XP009543803
Attorney, Agent or Firm:
YKI INTELLECTUAL PROPERTY ATTORNEYS (JP)
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