Title:
ACOUSTIC RESONATORS
Document Type and Number:
WIPO Patent Application WO2004015862
Kind Code:
A3
Abstract:
An acoustic resonator of one inventive aspect includes a substrate, at least one generally crystalline primer layer provided on the substrate either directly or on top of one or more intermediate layers, a generally smooth and generally crystalline electrode layer provided on the primer layer, and a piezoelectric layer provided on the electrode layer. The primer layer, or at least one of the primer layers, has a crystallographic structure belonging to a first crystal system, and the electrode layer has a crystallographic structure belonging to a second crystal system which is different to the first system. The atomic spacing of the primer layer or at least one of the said primer layers and that of the electrode matches to within about 15 %.
Inventors:
SHEARER CHRISTINE JANET (GB)
BRANCHER CARL (GB)
JAKKARAJU RAJKUMAR (GB)
BRANCHER CARL (GB)
JAKKARAJU RAJKUMAR (GB)
Application Number:
PCT/GB2003/003504
Publication Date:
October 14, 2004
Filing Date:
August 11, 2003
Export Citation:
Assignee:
TRIKON TECHNOLOGIES LTD (GB)
SHEARER CHRISTINE JANET (GB)
BRANCHER CARL (GB)
JAKKARAJU RAJKUMAR (GB)
SHEARER CHRISTINE JANET (GB)
BRANCHER CARL (GB)
JAKKARAJU RAJKUMAR (GB)
International Classes:
H01L41/18; H03H3/02; H01L41/09; H03H9/17; (IPC1-7): H03H9/13; H03H3/02
Foreign References:
| US20020006733A1 | 2002-01-17 | |||
| EP1054460A2 | 2000-11-22 | |||
| US5587620A | 1996-12-24 | |||
| EP0963040A2 | 1999-12-08 | |||
| US20040021400A1 | 2004-02-05 | |||
| GB2391408A | 2004-02-04 |
Other References:
YOSHINO Y ET AL: "Effect of buffer electrodes in crystallization of zinc oxide thin film for thin film bulk acoustic wave resonator", MATERIALS SCIENCE OF MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES II. SYMPOSIUM, BOSTON, USA, 29 November 1999 (1999-11-29) - 1 December 1999 (1999-12-01), Mat. Res. Soc. Symp. Proc., vol. 605, 2000, pages 267 - 272, XP009030776, ISBN: 1-55899-513-7
LEE S-H ET AL: "Influence of electrodes and Bragg reflector on the quality of thin film bulk acoustic wave resonators", 2002 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND PDA EXHIBITION, NEW ORLEANS, USA, 29 May 2002 (2002-05-29) - 31 May 2002 (2002-05-31), pages 45 - 49, XP010618917, ISBN: 0-7803-7082-1
LEE S-H ET AL: "Influence of electrodes and Bragg reflector on the quality of thin film bulk acoustic wave resonators", 2002 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND PDA EXHIBITION, NEW ORLEANS, USA, 29 May 2002 (2002-05-29) - 31 May 2002 (2002-05-31), pages 45 - 49, XP010618917, ISBN: 0-7803-7082-1
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