Title:
ACOUSTIC TRANSDUCER, AND MICROPHONE USING THE ACOUSTIC TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2011/148778
Kind Code:
A1
Abstract:
In an acoustic sensor (11), a vibrating membrane (22) and a fixed membrane (23) are formed on the upper face of a semiconductor substrate, and an acoustic wave is detected by the change of capacitance between a vibration electrode (22a) of the vibrating membrane (22) and a fixed electrode (23a) of the fixed membrane (23). The fixed membrane(23) is provided with a plurality of sound holes (32) for delivering the acoustic wave from the outside to the vibrating membrane (22), and the fixed electrode (23a) is formed so that the boundary of the edge portion (40) does not intersect the sound holes (32).
Inventors:
KASAI TAKASHI
UCHIDA YUKI
HORIMOTO YASUHIRO
CONTI SEBASTIANO
UCHIDA YUKI
HORIMOTO YASUHIRO
CONTI SEBASTIANO
Application Number:
PCT/JP2011/060714
Publication Date:
December 01, 2011
Filing Date:
May 10, 2011
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
ST MICROELECTRONICS SRL (IT)
KASAI TAKASHI
UCHIDA YUKI
HORIMOTO YASUHIRO
CONTI SEBASTIANO
ST MICROELECTRONICS SRL (IT)
KASAI TAKASHI
UCHIDA YUKI
HORIMOTO YASUHIRO
CONTI SEBASTIANO
International Classes:
H04R19/04
Domestic Patent References:
| WO2005086535A1 | 2005-09-15 |
Foreign References:
| JP2009038732A | 2009-02-19 | |||
| JP2008053400A | 2008-03-06 | |||
| JP2008113057A | 2008-05-15 | |||
| JP2006067547A | 2006-03-09 |
Other References:
See also references of EP 2579617A4
Attorney, Agent or Firm:
MASUI, Yoshihisa et al. (JP)
Yoshihisa Masui (JP)
Yoshihisa Masui (JP)
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Claims:
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