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Patent Searching and Data


Title:
ACOUSTIC WAVE DEVICE, HIGH FREQUENCY FRONT END CIRCUIT, COMMUNICATION DEVICE AND METHOD FOR PRODUCING ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/124126
Kind Code:
A1
Abstract:
Provided is an acoustic wave device which is capable of enhancing the productivity more reliably. An acoustic wave device 1 according to the present invention is provided with: a piezoelectric substrate 2 which comprises a supporting substrate 3 and a piezoelectric layer 5 that is provided on the supporting substrate 3 directly or indirectly, and which has a first main surface 2a that is on the piezoelectric layer 5 side and a second main surface 2b that is on the supporting substrate 3 side; an IDT electrode 7 which is provided on the first main surface 2a directly or indirectly; a supporting member 8 which is provided on the supporting substrate 3; a cover member 9 which is provided on the supporting member 8; a through via electrode 17 which is provided so as to penetrate through the supporting substrate 3, and which is electrically connected to the IDT electrode 7; a first wiring electrode 15 which is provided on the second main surface 2b of the piezoelectric substrate 2, and which is electrically connected to the through via electrode 17; and a protective film 16 which is provided on the second main surface 2b so as to cover at least a part of the first wiring electrode 15. When viewed from the normal direction of the second main surface 2b, the protective film 16 is positioned inside the supporting member 8.

Inventors:
KISHIMOTO, Yutaka (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
KAI, Seiji (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
SAWAMURA, Makoto (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
KISHI, Yuzo (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
Application Number:
JP2018/045213
Publication Date:
June 27, 2019
Filing Date:
December 10, 2018
Export Citation:
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Assignee:
MURATA MANUFACTURING CO., LTD. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
International Classes:
H03H9/25; H03H3/08; H01L21/301
Domestic Patent References:
WO2017212774A12017-12-14
WO2016208677A12016-12-29
Foreign References:
JP2006109400A2006-04-20
JP2005295363A2005-10-20
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (Chuo Odori FN Bldg, 3-8 Tokiwamachi 1-chome, Chuo-ku, Osaka-sh, Osaka 28, 〒5400028, JP)
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