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Patent Searching and Data


Title:
ACOUSTIC WAVE DEVICE, HIGH FREQUENCY FRONT END CIRCUIT AND COMMUNICATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/124128
Kind Code:
A1
Abstract:
Provided is an acoustic wave device wherein a piezoelectric layer is not susceptible to breakage and the filter characteristics are not susceptible to deterioration. An acoustic wave device 1 according to the present invention is provided with: a silicon supporting substrate 2 which has first and second main surfaces 2a, 2b that are on the opposite side of each other; a piezoelectric structure 12 which is provided on the first main surface 2a and has a piezoelectric layer 6; an IDT electrode 7 which is provided on the piezoelectric layer 6; a supporting layer 3 which is provided on the first main surface 2a of the silicon supporting substrate 2 so as to surround the piezoelectric layer 6; a cover layer 4 which is provided on the supporting layer 3; a through via electrode 11 which is provided so as to penetrate through the silicon supporting substrate 2 and the piezoelectric structure 12; and a first wiring electrode 8 which is connected to the through via electrode 11, while being electrically connected to the IDT electrode 7. The piezoelectric structure 12 comprises at least one insulating layer that includes the piezoelectric layer 6. The first wiring electrode 8 is formed on an insulating layer of the piezoelectric structure 12.

Inventors:
KISHI YUZO (JP)
KISHIMOTO YUTAKA (JP)
SAWAMURA MAKOTO (JP)
KAI SEIJI (JP)
Application Number:
PCT/JP2018/045215
Publication Date:
June 27, 2019
Filing Date:
December 10, 2018
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25; H03H9/145
Domestic Patent References:
WO2017212774A12017-12-14
WO2017212742A12017-12-14
WO2018164209A12018-09-13
WO2015098679A12015-07-02
Foreign References:
JP2017157922A2017-09-07
JP2017011681A2017-01-12
JP2015091065A2015-05-11
JP2004248243A2004-09-02
JP2009117544A2009-05-28
JP2018101913A2018-06-28
JP2006067271A2006-03-09
JP2007194999A2007-08-02
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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