Title:
ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/172287
Kind Code:
A1
Abstract:
Provided is an acoustic wave device using Lamb waves and having a very small characteristic change caused by a change in the film thickness of an IDT electrode. An acoustic wave device (1) includes a piezoelectric substrate (6), and IDT electrodes (7) provided to penetrate through the piezoelectric substrate (6) at the piezoelectric oscillation part of the piezoelectric substrate (6).
Inventors:
KIMURA TETSUYA (JP)
KADOTA MICHIO (JP)
KADOTA MICHIO (JP)
Application Number:
PCT/JP2013/063254
Publication Date:
November 21, 2013
Filing Date:
May 13, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H01L41/09; H01L41/18; H03H9/25
Domestic Patent References:
| WO2007046236A1 | 2007-04-26 |
Foreign References:
| JP2007251910A | 2007-09-27 | |||
| JP2006217566A | 2006-08-17 | |||
| JP2011114397A | 2011-06-09 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
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