Title:
ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/186240
Kind Code:
A1
Abstract:
Provided is an acoustic wave device in which breakdown around a via electrode is unlikely to occur. An acoustic wave device 1 includes: a piezoelectric substrate 2; an IDT electrode 3 (functional electrode) provided on the piezoelectric substrate 2; a support layer 5 (first layer) provided on the piezoelectric substrate 2; a cover layer 6 (second layer) provided on the support layer 5; and a via electrode 7 which penetrates the support layer 5 and the cover layer 6 and has a first end face 7a located on the piezoelectric substrate 2 side, a second end face 7b located on the side opposite to the first end face 7a, and a side face 7c connecting the first end face 7a and the second end face 7b. In the via electrode 7, the area of the second end face 7b is larger than the area of the first end face 7a. When a direction in which the via electrode 7 penetrates the support layer 5 and the cover layer 6 is taken as a first direction Z, an arbitrary direction orthogonal to the first direction Z is taken as a second direction and the via electrode is projected in the second direction, the shape of the side face 7c of the via electrode 7 includes a shape curved inward in the via electrode 7.
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Inventors:
HIRANO YASUHIKO (JP)
Application Number:
PCT/JP2018/012543
Publication Date:
October 11, 2018
Filing Date:
March 27, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2015159465A1 | 2015-10-22 | |||
| WO2015199132A1 | 2015-12-30 |
Foreign References:
| JP2013239758A | 2013-11-28 | |||
| US20100301486A1 | 2010-12-02 | |||
| JP2017017730A | 2017-01-19 | |||
| JP2016005162A | 2016-01-12 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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