Title:
ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/184622
Kind Code:
A1
Abstract:
Provided is an acoustic wave device which is made so that generation of residues of a resist of a reflector are difficult to generate, without degrading impedance characteristics and the like. An acoustic wave device 1 is provided with: a piezoelectric substrate 2; and an IDT electrode 3 and reflectors 13A, 13B that are disposed on the piezoelectric substrate 2. The IDT electrode 3 has: first and second busbars 4, 6 having first and second opening parts 4d, 6d respectively disposed along a first direction x (acoustic wave propagation direction); first and second edge regions Ca, Cb; and first and second gap regions Da, Db. A low sound speed region is formed in the first and second edge regions Ca, Cb, and a high sound speed region is formed in a region in which the first and second opening parts 4d, 6d are disposed. The reflector 13A has: first and second reflector busbars 14A, 16A; and a first reflection electrode finger 15A in which a second end part 15a opposes the second reflector busbar 16A. When viewed from the first direction x, the first reflection electrode finger 15A overlaps the entirety of the second gap region Db.
Inventors:
AJIMA DAISUKE (JP)
KOYANAGI TAKUYA (JP)
KOYANAGI TAKUYA (JP)
Application Number:
PCT/JP2020/010594
Publication Date:
September 17, 2020
Filing Date:
March 11, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145
Domestic Patent References:
| WO2018225650A1 | 2018-12-13 | |||
| WO2016084526A1 | 2016-06-02 | |||
| WO2018123882A1 | 2018-07-05 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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