Title:
ACOUSTIC WAVE MODULATION ELEMENT AND PHYSICAL QUANTITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/136876
Kind Code:
A1
Abstract:
Provided are an acoustic wave modulation element and a physical quantity sensor with which the physical quantity of an object to be detected can be accurately detected with improved sensitivity over the prior art. An acoustic wave modulation element (10) comprises: a piezoelectric member (11); a first electrode (12) that is attached to the piezoelectric member (11) and that excites an acoustic wave in the piezoelectric member (11); a second electrode (13) that is attached to the piezoelectric member (11) and that receives the acoustic wave; and a magnetostrictive material part (15) that is provided in or near a region in which the acoustic wave is present. The magnetostrictive material part (15) includes: a pair of magnetic flux propagation parts (15a, 15b) that are provided on one primary surface (11a) of the piezoelectric member (11) and that are capable of propagating a magnetic flux of an external magnetic field; and a magnetic collection part (15c) that is provided between the pair of magnetic flux propagation parts (15a, 15b) on the one primary surface (11a) and that is disposed on or near a propagation path (14) of the acoustic wave. The thickness of a side surface of the magnetic collection part (15c) that opposes the pair of magnetic flux propagation parts (15a, 15b) is less than the thickness of a side surface of the pair of magnetic flux propagation parts (15a) that opposes the magnetic collection part (15c).
Inventors:
SUZUKI EIJI (JP)
Application Number:
PCT/JP2018/048486
Publication Date:
July 02, 2020
Filing Date:
December 28, 2018
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
G01L1/00; G01K7/32; G01R33/02; H03B5/30; H03H9/145
Foreign References:
| JP5080811B2 | 2012-11-21 | |||
| US8269490B2 | 2012-09-18 | |||
| CN101504445A | 2009-08-12 | |||
| CN101504446A | 2009-08-12 | |||
| CN102435959A | 2012-05-02 |
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
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