Title:
ACTIVE CONTROL OF ELECTRON TEMPERATURE IN AN ELECTROSTATICALLY SHIELDED RADIO FREQUENCY PLASMA SOURCE
Document Type and Number:
WIPO Patent Application WO2001062053
Kind Code:
A3
Abstract:
A method and apparatus for generating a plasma having a selected electron temperature, by: generating electrical power having components at at least two different frequencies; deriving electromagnetic energy at the at least two different frequencies from the generated electrical power and inductively coupling the derived electromagnetic energy into a region containing an ionizable gas to ionize the gas and create a plasma composed of the resulting ions; and selecting a power level for the electrical power component at each frequency in order to cause the plasma to have the selected electron temperature.
Inventors:
JOHNSON WAYNE L (US)
Application Number:
PCT/US2001/004133
Publication Date:
February 14, 2002
Filing Date:
February 09, 2001
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
JOHNSON WAYNE L (US)
JOHNSON WAYNE L (US)
International Classes:
H01J37/32; H05H1/46; (IPC1-7): H01J37/32
Foreign References:
| US5897713A | 1999-04-27 | |||
| US5846885A | 1998-12-08 |
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