Title:
ACTIVE GAS GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/203674
Kind Code:
A1
Abstract:
The objective of the present invention is to provide an active gas generation device capable of generating a high-density active gas with adequate homogeneity and at a relatively high speed. Then, in the present invention, the active gas generation device is constituted by installing, under an active gas generation electrode group and a nozzle-constituting part, a gas jet flow-straightener (70). After the passage of the active gas through a plurality of nozzles, gases are received as a whole by the gas jet flow-straightener (70) at an entry portion (711) of a gas flow-straightening passage (71). The gas flow-straightening passage (71) is formed in such a manner that the exit opening surface area of the exit portion (710) is set to be narrower than the entrance opening surface area of the entry portion (711), and, each of the cylindrical gas jets from the passage of the active gas through the plurality of nozzles is converted into a linear flow-straightened active gas by the flow-straightening action of the gas flow-straightening passage (71).
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Inventors:
WATANABE KENSUKE (JP)
NISHIMURA SHINICHI (JP)
YAMADA YOSHIHITO (JP)
NISHIMURA SHINICHI (JP)
YAMADA YOSHIHITO (JP)
Application Number:
PCT/JP2016/065658
Publication Date:
November 30, 2017
Filing Date:
May 27, 2016
Export Citation:
Assignee:
TOSHIBA MITSUBISHI ELEC IND (JP)
International Classes:
H05H1/30
Foreign References:
| US5108535A | 1992-04-28 | |||
| JP2011154973A | 2011-08-11 |
Other References:
See also references of EP 3468309A4
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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