ACTIVE GAS GENERATION DEVICE

WIPO Patent Application WO/2018/104988

A1

The purpose of the present invention is to provide an active gas generation device capable of generating a high-quality active gas. By means of electrical discharge generated in a discharge space (66) formed between a high voltage-side electrode constituting section (1A) and a grounding-side electrode constituting section (2A) of an active gas generating electrode group (301), the present invention activates a starting material gas that has been supplied, and generates an active gas. A combined structure of covers (31, 32) has starting material gas flow channels (31h, 32h) for a starting material gas supply path, said starting material gas flow channels completely separating the discharge space (66) and an alternating current voltage applying space (R31) from each other, and independently from the alternating current voltage applying space (R31), guiding to the discharge space (66) the starting material gas supplied from the outside. A housing contact space (R34) formed between a metal housing (34) and the covers (31, 32) and between the metal housing and an electrode constituting section disposition table (33) is completely separated from the alternating current voltage applying space (R31) and the discharge space (66).

WATANABE KENSUKE (JP)
YAMADA YOSHIHITO (JP)
NISHIMURA SHINICHI (JP)

PCT/JP2016/085999

June 14, 2018

December 05, 2016

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TOSHIBA MITSUBISHI ELEC IND (JP)

H01L21/31; H05H1/24

WO2008123142A1	2008-10-16
WO2008132901A1	2008-11-06
WO2013035377A1	2013-03-14

JP2009199740A	2009-09-03
JP2010108665A	2010-05-13
JP2011154973A	2011-08-11
JP5694543B2	2015-04-01
JPS5328685B2	1978-08-16

See also references of EP 3550594A4

YOSHITAKE Hidetoshi et al. (JP)

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