Title:
ACTIVE GAS GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/057424
Kind Code:
A1
Abstract:
The purpose of the present disclosure is to provide an active gas generation device capable of supplying a high-concentration active gas. In an active gas generation device (5) according to the present disclosure, a first number of high-voltage electrode structures (13) are each held inside a holding space (S54) of a corresponding groove (54) among a first number of grooves (54), and a second number of grounding electrode structures (14, 3, 4) are each held inside a holding space (S54) of a corresponding groove (54) among a second number of grooves (54). The first number of high-voltage electrode structures (13) and the second number of grounding electrode structures (14, 3, 4) are alternately disposed in a Y-direction. A first planar region of each of the first number of high-voltage electrode structures (13) and a second planar region of each of the second number of grounding electrode structures (14, 3, 4) face each other with a separation space (S56) therebetween.
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Inventors:
WATANABE KENSUKE (JP)
ARITA REN (JP)
ARITA REN (JP)
Application Number:
PCT/JP2022/034306
Publication Date:
March 21, 2024
Filing Date:
September 14, 2022
Export Citation:
Assignee:
TOSHIBA MITSUBISHI ELECTRIC INDUSTRIAL SYSTEMS CORP (JP)
International Classes:
H05H1/24
Domestic Patent References:
| WO2005005798A1 | 2005-01-20 |
Foreign References:
| JP2014094863A | 2014-05-22 | |||
| JPH071592U | 1995-01-10 | |||
| JPS557564A | 1980-01-19 | |||
| US20160233059A1 | 2016-08-11 | |||
| JP6719856B2 | 2020-07-08 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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