Title:
ACTIVE-MATRIX SUBSTRATE AND DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/176040
Kind Code:
A1
Abstract:
An active-matrix substrate (7) comprising: a plurality of first contact holes (H1) penetrating an inorganic insulation film (16), a first protective layer (18a), which is a silicon nitride film, and a second protective layer (18b); a plurality of second contact holes (H2) penetrating the inorganic insulation film (16) and the second protective layer; and a first transistor (T1) and a second transistor (T2). A channel region of the second transistor does not overlap the first protective layer.
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Inventors:
MIWA MASAHIKO
KANZAKI YOHSUKE
SAITOH TAKAO
YAMANAKA MASAKI
SUN YI
KANEKO SEIJI
KANZAKI YOHSUKE
SAITOH TAKAO
YAMANAKA MASAKI
SUN YI
KANEKO SEIJI
Application Number:
PCT/JP2018/010178
Publication Date:
September 19, 2019
Filing Date:
March 15, 2018
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L21/336; H01L29/786
Foreign References:
| JP2001250949A | 2001-09-14 | |||
| JP2017173505A | 2017-09-28 | |||
| US20170294456A1 | 2017-10-12 | |||
| JP2001053287A | 2001-02-23 | |||
| JP2008053288A | 2008-03-06 | |||
| JP2003152100A | 2003-05-23 | |||
| JPS6213061A | 1987-01-21 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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