ACTIVE OXYGEN SUPPLY DEVICE, DEVICE FOR CONDUCTING TREATMENT WITH ACTIVE OXYGEN, AND METHOD FOR CONDUCTING TREATMENT WITH ACTIVE OXYGEN

WIPO Patent Application WO/2023/127837

A1

Provided is an active oxygen supply device capable of more efficiently supplying active oxygen to the surface of an object to be treated. An active oxygen supply device comprises a plasma actuator and a heater in a housing having at least one opening. The plasma actuator comprises a first electrode, a dielectric material and a second electrode stacked in this order, the first electrode is an exposed electrode provided on a first surface that is one of the surfaces of the dielectric material, the plasma actuator applies a voltage between the first and second electrodes to generate dielectric-barrier discharge oriented from the first electrode to the second electrode and induces a flow in a first direction that is one direction along the surface of the dielectric material from the first electrode. The heater heats the induced flow and generates active oxygen in the induced flow. The plasma actuator and the heater are disposed so that the induced flow containing active oxygen flows out of the housing through the opening.

KANEKO SHOTA (JP)
YAMAUCHI KAZUHIRO (JP)
FURUKAWA TAKUMI (JP)
OZAWA MASAKI (JP)
TAKASHIMA KENJI (JP)
GOTO MOTOTERU (JP)

PCT/JP2022/048044

July 06, 2023

December 26, 2022

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CANON KK (JP)

C01B13/11; B01J19/08; H05H1/24

WO2015015587A1	2015-02-05
WO2021256450A1	2021-12-23

JP2004236613A	2004-08-26
JP2019155006A	2019-09-19
JP2001137319A	2001-05-22

IP FIRM SHUWA (JP)

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