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Title:
ACTIVE OXYGEN VOLUME MEASUREMENT DEVICE, ACTIVE OXYGEN SURFACE PROCESSING DEVICE, ACTIVE OXYGEN VOLUME MEASUREMENT METHOD, AND ACTIVE OXYGEN SURFACE PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2013/035304
Kind Code:
A1
Abstract:
An objective of the present invention is to accurately measure an active oxygen surface effect volume in a surface process using active oxygen. This active oxygen volume measurement device comprises: a first sensor further comprising a first oscillator which is positioned near an object to be processed, and which outputs a mass change in the first oscillator based on the active oxygen effect volume as a first frequency change quantity; a second sensor further comprising a second oscillator which is positioned near the object to be processed, and which outputs a mass change in the second oscillator based on a disturbance caused by a change in temperature, humidity, or pressure, as a second frequency change quantity; and a measurement unit which is configured to compute the difference between first frequency change quantity and the second frequency change quantity, and to identify the difference as a frequency change quantity by the actual active oxygen effect volume.

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Inventors:
NODA KAZUTOSHI (JP)
IWAMORI SATORU (JP)
KINOSHITA SHINOBU (JP)
IWASAKI TATSUYUKI (JP)
YOSHINO KIYOSHI (JP)
MATSUMOTO HIROYUKI (JP)
Application Number:
PCT/JP2012/005594
Publication Date:
March 14, 2013
Filing Date:
September 04, 2012
Export Citation:
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Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
UNIV TOKAI EDUCATIONAL SYSTEM (JP)
IWASAKI ELECTRIC CO LTD (JP)
NODA KAZUTOSHI (JP)
IWAMORI SATORU (JP)
KINOSHITA SHINOBU (JP)
IWASAKI TATSUYUKI (JP)
YOSHINO KIYOSHI (JP)
MATSUMOTO HIROYUKI (JP)
International Classes:
G01N5/02; B01J19/08; B01J19/12; B08B7/00
Domestic Patent References:
WO2010044394A12010-04-22
Foreign References:
JPH08332371A1996-12-17
JP2009098133A2009-05-07
JPH10132646A1998-05-22
JP2000246200A2000-09-12
Other References:
HIROYUKI MATSUMOTO ET AL.: "Application of Quartz Crystal Microbalance with Organic Thin Films prepared by Spin coat and RF Sputtering for Active Oxygen Monitoring", IEICE TECHNICAL REPORT, vol. 110, no. 409(OM, 31 January 2011 (2011-01-31), pages 11 - 14
HIROYUKI MATSUMOTO ET AL.: "Carbon/Silver-QCM ni yoru Kassei Sansoshu no Keisoku", NATIONAL CONVENTION RECORD I.E.E. JAPAN, vol. 2009, no. 3, 17 March 2009 (2009-03-17), pages 251 - 252
Attorney, Agent or Firm:
OKABE, Yuzuru et al. (JP)
Okabe 讓 (JP)
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Claims:



 
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