Title:
ACTIVE RAY-SENSITIVE OR RADIATION-SENSITIVE COMPOSITION, METHOD FOR PURIFYING ACTIVE RAY-SENSITIVE OR RADIATION-SENSITIVE COMPOSITION, PATTERN-FORMING METHOD, AND METHOD FOR PRODUCING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/163922
Kind Code:
A1
Abstract:
Provided are: an active ray-sensitive or radiation-sensitive composition capable of forming a pattern exhibiting excellent resolution and few residual defects; a method for purifying an active ray-sensitive or radiation-sensitive composition; a pattern-forming method that includes the method for purifying an active ray-sensitive or radiation-sensitive composition; and a method for producing an electronic device. Thus, an active ray-sensitive or radiation-sensitive composition that contains a metal cation and a ligand, wherein the number of in-liquid particles having a particle diameter of 0.15μm or less in 1mL of the composition is 10 or fewer.
Inventors:
TSUBAKI HIDEAKI (JP)
NIHASHI WATARU (JP)
NIHASHI WATARU (JP)
Application Number:
PCT/JP2017/009652
Publication Date:
September 28, 2017
Filing Date:
March 10, 2017
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G03F7/004; G03F7/20; G03F7/26
Domestic Patent References:
| WO2015026482A2 | 2015-02-26 | |||
| WO2009123109A1 | 2009-10-08 | |||
| WO2009123109A1 | 2009-10-08 |
Foreign References:
| JP2010508560A | 2010-03-18 | |||
| JP2005300737A | 2005-10-27 | |||
| JP2013092643A | 2013-05-16 | |||
| JP2014219506A | 2014-11-20 | |||
| JP2012185484A | 2012-09-27 | |||
| JP2015513540A | 2015-05-14 | |||
| JP2011253185A | 2011-12-15 | |||
| US20150056542A1 | 2015-02-26 | |||
| JP2013011833A | 2013-01-17 | |||
| US20110039195A1 | 2011-02-17 | |||
| JP2013068814A | 2013-04-18 | |||
| US20080248425A1 | 2008-10-09 | |||
| JP2002090991A | 2002-03-27 | |||
| JPH1121393A | 1999-01-26 | |||
| JPH1045961A | 1998-02-17 | |||
| JPH03270227A | 1991-12-02 | |||
| JP2013164509A | 2013-08-22 |
Other References:
See also references of EP 3435158A4
MYUA: "The Chemical Daily", 1 February 2016, MIYOSHI OIL & FAT CO., LTD.
ACS NANO, vol. 4, no. 8, pages 4815 - 4823
MYUA: "The Chemical Daily", 1 February 2016, MIYOSHI OIL & FAT CO., LTD.
ACS NANO, vol. 4, no. 8, pages 4815 - 4823
Attorney, Agent or Firm:
NAKASHIMA Junko et al. (JP)
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