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Patent Searching and Data


Title:
ACTIVE-VIBRATION DAMPING SYSTEM AND METHOD FOR CONTROLLING DISTURBANCE OF TRANSFER APPARATUS BY USING SAME
Document Type and Number:
WIPO Patent Application WO/2019/045155
Kind Code:
A1
Abstract:
The present invention relates to an active-vibration damping system and, specifically, to: an active-vibration damping system capable of quickly removing vibration by applying offset force to the disturbance generated by the driving of an upper stage or a gantry; and a method for controlling disturbance of a transfer apparatus by using the same. The active-vibration damping system (1000) of the present invention is formed in a structure in which a vibration damping mount (1500) positioned between a base (1200) and a lower frame (1300) has: a displacement sensor (1580) positioned under a displacement sensor target (1512), provided at an air spring upper plate (1511) of an air spring (1510), so as to sense a gap with the displacement sensor target (1512), thereby sensing, in real time, a gap formed between the lower surface of the air spring upper plate (1511) and the upper surface of a clamp ring (1514) which are assembled at the upper part of an air spring chamber (1513); and a servo valve (1590) receiving a signal from a vibration damping system controller (1400) according to a value of the displacement sensor so as to be operated in real time, thereby supplying air, and thus enables the height of the air spring (1510) to be adjusted in real time.

Inventors:
KIM KWANG SAN (KR)
CHOI SUNG WON (KR)
CHOI YOUNG MAN (KR)
Application Number:
KR2017/009725
Publication Date:
March 07, 2019
Filing Date:
September 05, 2017
Export Citation:
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Assignee:
DAEIL SYSTEM CO LTD (KR)
UNIV AJOU IND ACADEMIC COOP FOUND (KR)
International Classes:
F16F15/027; F16F15/023; G05D19/02
Foreign References:
JP3825869B22006-09-27
JP2003314610A2003-11-06
KR101162527B12012-07-09
JP2010014159A2010-01-21
JP2010210380A2010-09-24
Attorney, Agent or Firm:
AJU INTERNATIONAL LAW & PATENT GROUP (KR)
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