Title:
ACTUATOR DEVICE MANUFACTURING METHOD AND LIQUID JET DEVICE
Document Type and Number:
WIPO Patent Application WO/2005/056295
Kind Code:
A1
Abstract:
A method for manufacturing an actuator device having improved durability and reliability realized by preventing a vibratory plate from separating and a liquid jet device are disclosed. The method comprises a step of fabricating a vibratory plate on one side of a base and a step of fabricating a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode on the vibratory plate. The vibratory plate fabricating step includes an insulating film forming substep at which a zirconium layer is formed on the one side of the base by sputtering, inserting the base having the zirconium layer into a thermally oxidizing furnace heated above 700°C at speed of 200 mm/min or more, and thermally oxidizing the zirconium layer thereby to form an insulating film of zirconium oxide.
Inventors:
ITO MAKI (JP)
MURAI MASAMI (JP)
LI XIN-SHAN (JP)
SHINBO TOSHINAO (JP)
MURAI MASAMI (JP)
LI XIN-SHAN (JP)
SHINBO TOSHINAO (JP)
Application Number:
PCT/JP2004/018378
Publication Date:
June 23, 2005
Filing Date:
December 09, 2004
Export Citation:
Assignee:
SEIKO EPSON CORP (JP)
ITO MAKI (JP)
MURAI MASAMI (JP)
LI XIN-SHAN (JP)
SHINBO TOSHINAO (JP)
ITO MAKI (JP)
MURAI MASAMI (JP)
LI XIN-SHAN (JP)
SHINBO TOSHINAO (JP)
International Classes:
B41J2/16; H01L41/22; (IPC1-7): B41J2/16; B41J2/045; B41J2/055
Foreign References:
| JP2002240297A | 2002-08-28 | |||
| JPH06297720A | 1994-10-25 | |||
| JPH09254386A | 1997-09-30 | |||
| JP2002064092A | 2002-02-28 |
Attorney, Agent or Firm:
Kurihara, Hiroyuki (Iwasaki Bldg. 6F, 3-15, Hiroo 1-chom, Shibuya-ku Tokyo12, JP)
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