ACTUATOR DEVICE - HAMAMATSU PHOTONICS KK

Title:

ACTUATOR DEVICE

Document Type and Number:

WIPO Patent Application WO/2017/126289

Kind Code:

A1

Abstract:

This actuator device 1 is provided with: a support part 5; a moveable part 6; a coupling part 8 that couples the moveable part 6 to the support part 5 on a second axis line X2 such that the moveable part 6 can be oscillated around the second axis line X2; a first wiring 21 provided on the coupling part 8; a second wiring 31 provided on the support part 5; and, among one wiring of the first wiring 21 and the second wiring 31, an insulation layer 52 that has a first opening 52a which exposes a surface 25a on the opposite side of the support part 5 at a first connection portion 25 located on the support part 5, and that covers a corner 25b of the first connection portion 25. A first metal material that constitutes the first wiring 21 has a higher rigidity than a second metal material that constitutes the second wiring 31. The other wiring of the first wiring 21 and the second wiring 31 is connected to the surface 25a of the first connection portion 25 at the first opening 52a.

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Inventors:

TAKIMOTO SADAHARU (JP)
MORINAGA YUKI (JP)
SUZUKI DAIKI (JP)
WARASHINA YOSHIHISA (JP)

Application Number:

PCT/JP2016/088436

Publication Date:

July 27, 2017

Filing Date:

December 22, 2016

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS KK (JP)

International Classes:

G02B26/08; B81B3/00

Foreign References:

JP2001264677A	2001-09-26
JP2013035081A	2013-02-21
JP2015031792A	2015-02-16
JP2015031786A	2015-02-16
JP2010098905A	2010-04-30

Other References: