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Patent Searching and Data


Title:
ACTUATOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/126290
Kind Code:
A1
Abstract:
This actuator device 1 is provided with: a support part 5; a moveable part 6; a coupling part 8 that couples the moveable part 6 to the support part 5 on a second axis line X2 such that the moveable part 6 can be oscillated around the second axis line X2; a first wiring 21 provided on the coupling part 8; and a second wiring 31 provided on the support part 5. A first metal material that constitutes the first wiring 21 has a higher rigidity than a second metal material that constitutes the second wiring 31. The second wiring 31 is connected to a surface 25a of a first connection portion 25, the surface 25a being on the opposite side of the support part 5 at the first connection portion 25 located on the support part 5.

Inventors:
TAKIMOTO Sadaharu (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
MORINAGA Yuki (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
SUZUKI Daiki (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
WARASHINA Yoshihisa (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
Application Number:
JP2016/088437
Publication Date:
July 27, 2017
Filing Date:
December 22, 2016
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS K.K. (1126-1, Ichino-cho Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
International Classes:
G02B26/10; B81B3/00; G02B26/08; H02K33/18
Foreign References:
JP2001264677A2001-09-26
JP2013035081A2013-02-21
JP2015031792A2015-02-16
JP2015031786A2015-02-16
JP2010098905A2010-04-30
US8218218B22012-07-10
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (SOEI PATENT AND LAW FIRM, Marunouchi MY PLAZA 9th fl. 1-1, Marunouchi 2-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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