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Patent Searching and Data


Title:
ACTUATOR, VALVE, FLUID SUPPLY SYSTEM, AND SEMICONDUCTOR PRODUCTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/009106
Kind Code:
A1
Abstract:
Provided are an actuator, a valve, a fluid supply system, and a semiconductor production device that make it possible for variations in an opening/closing speed to be reduced by means of a simple configuration. A valve (1) that comprises: a body (10) that has fluid passages (11b, 11c) formed therein; a diaphragm (15) that opens/closes the fluid passages; a stem (26) that can move toward and away from the diaphragm (15) to make the diaphragm (15) open/close the fluid passages (11b, 11c); a pressure-reducing valve (40) that is provided inside a casing and reduces the pressure of a drive fluid that is supplied from the outside to a prescribed pressure; and a drive part (30) that is provided inside the casing and uses drive fluid that the pressure-reducing valve (40) has reduced to the prescribed pressure to drive the stem (26).

Inventors:
MIURA, Takeru (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
SHINOHARA, Tsutomu (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
NAKATA, Tomohiro (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
INADA, Toshiyuki (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
WATANABE, Kazunari (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
KONDO, Kenta (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
SATO, Hidenobu (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
YUHARA, Tomoko (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
Application Number:
JP2018/023882
Publication Date:
January 10, 2019
Filing Date:
June 22, 2018
Export Citation:
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Assignee:
FUJIKIN INCORPORATED (2-3-2, Itachibori Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
International Classes:
F15B15/14; F16K31/122; H01L21/31
Foreign References:
JPS5362582U1978-05-26
JPH01178285U1989-12-20
JP2012026577A2012-02-09
Attorney, Agent or Firm:
WILLFORT INTERNATIONAL PATENT FIRM (Nihonbashi TC Bldg. 1F, 19-7 Nihonbashi Koamicho, Chuo-k, Tokyo 16, 〒1030016, JP)
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