Title:
ADAPTOR AND VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2016/136331
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump that can accommodate a wide variety of specification changes at low cost, and an adapter that is used in said vacuum pump. [Solution] A turbo-molecular pump 1 is provided with: a base 50; stationary blades 70 that are arranged on the base 50 in the axial direction A of a rotor 20; rotary blades 22 that are integrally attached to the rotor 20; a cylindrical housing 10 that houses the stationary blades 70 and is integrally attached to the base 50; and an adapter 80 that can be exchanged in accordance with the type of stationary blade 70, rotary blade 22, or housing 10, is detachably mounted atop the base 50, and supports the stationary blades 70 in the axial direction A.
Inventors:
OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)
Application Number:
PCT/JP2016/051421
Publication Date:
September 01, 2016
Filing Date:
January 19, 2016
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04; F04D29/64
Foreign References:
| JPS6043197U | 1985-03-27 | |||
| JP2003278691A | 2003-10-02 |
Other References:
See also references of EP 3263905A4
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