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Title:
ADDITIVE ADDED TO SOLUTION FOR ELECTROLYTIC COPPER PLATING USING ANODE OF PHOSPHORATED COPPER, SOLUTION FOR ELECTROLYTIC COPPER PLATING AND METHOD OF ELECTROLYTIC COPPER PLATING
Document Type and Number:
WIPO Patent Application WO/2007/086454
Kind Code:
A1
Abstract:
An additive added to a solution for electrolytic copper plating using an anode of phosphorated copper, comprising at least one component selected from the group consisting of alkenes and alkynes. Further, there is provided a solution for electrolytic copper plating used to carry out electrolysis with the use of an anode of phosphorated copper, characterized in that the above additive is contained. This additive for electrolytic copper plating even when electrolytic operation is continuously carried out with the use of a solution for electrolytic copper plating using an anode of phosphorated copper is effective in not only suppression of the generation of anode sludge but also inhibition of any denaturation of brightener components.

Inventors:
MATSUNAMI TAKASHI (JP)
NISHIKI SHINGO (JP)
MAEDA TAKEAKI (JP)
WATANABE HIROFUMI (JP)
YOKOHATA TAKASHI (JP)
Application Number:
PCT/JP2007/051152
Publication Date:
August 02, 2007
Filing Date:
January 25, 2007
Export Citation:
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Assignee:
OKUNO CHEM IND CO (JP)
MATSUNAMI TAKASHI (JP)
NISHIKI SHINGO (JP)
MAEDA TAKEAKI (JP)
WATANABE HIROFUMI (JP)
YOKOHATA TAKASHI (JP)
International Classes:
C25D3/38; H01L21/288; H05K3/40
Foreign References:
JPH11260824A1999-09-24
JPS59200786A1984-11-14
Attorney, Agent or Firm:
SAEGUSA, Eiji et al. (1-7-1 Doshomach, Chuo-ku Osaka-shi Osaka 45, JP)
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