Title:
ADHESIVE DEVICE AND TRANSFER DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2022/030297
Kind Code:
A1
Abstract:
Provided are an adhesive device capable of holding and peeling an object with a simple configuration, and a transfer technology using the same. This adhesive device comprises: a first electrode which has a main surface having adhesiveness which varies according to voltage control and has at least one opening which is positioned on the main surface side; a second electrode facing the first electrode; and a polymer material layer provided between the first electrode and the second electrode, wherein the first electrode has an insulating layer on the main surface side.
Inventors:
YAMADA YASUMI (JP)
Application Number:
PCT/JP2021/027693
Publication Date:
February 10, 2022
Filing Date:
July 27, 2021
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H01L21/677; H01L21/52; H05K13/04
Domestic Patent References:
| WO2008129989A1 | 2008-10-30 |
Foreign References:
| JP2007073802A | 2007-03-22 | |||
| JP2020145421A | 2020-09-10 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
Download PDF: