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Patent Searching and Data


Title:
ADHESIVE REMOVING DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2017/039184
Kind Code:
A1
Abstract:
A device for removing an adhesive for adhering a mask and a pellicle from the mask is disclosed. The disclosed adhesive removing device comprises: a laser emitting unit for emitting a laser beam at an adhesive layer formed between the mask and the pellicle; a control unit for controlling the wavelength, waveform, and energy density of the laser beam so as to remove the adhesive layer by the emission of the laser beam; and a photographing unit for monitoring a region at which the laser beam is emitted.

Inventors:
PARK, Ill Hyun (712-1308, 63 Gwanpyeong-ro 138beon-gil,Dongan-gu, Anyang-si, Gyeonggi-do, 14068, KR)
CHO, Dae Yub (102-701, 74 Irwolcheon-ro 4beon-gil,Gwonseon-gu, Suwon-si, Gyeonggi-do, 16413, KR)
KIM, Young Jung (Rm.501, 8 Gwanak-daero 374beon-gil,Dongan-gu, Anyang-si, Gyeonggi-do, 13946, KR)
Application Number:
KR2016/009002
Publication Date:
March 09, 2017
Filing Date:
August 17, 2016
Export Citation:
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Assignee:
EO TECHNICS CO.,LTD. (91 Dongpyeon-ro, Dongan-gu Anyang-si, Gyeonggi-do, 13930, KR)
International Classes:
G03F1/68; B08B7/00; G03F1/66
Foreign References:
KR101495031B12015-02-26
KR20120097893A2012-09-05
KR20080056458A2008-06-23
US8562749B22013-10-22
US7767365B22010-08-03
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (12F Daelim Acrotel, 13 Eonju-ro 30-gilGangnam-gu, Seoul, 06292, KR)
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