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Title:
ADJUSTABLE CAPACITOR, IMPEDANCE-MATCHING APPARATUS AND SEMICONDUCTOR-PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/233156
Kind Code:
A1
Abstract:
An adjustable capacitor, comprising a ferroelectric dielectric layer (1) and a first electrode (21) and a second electrode (22) located on two opposite sides of the ferroelectric dielectric layer (1); and the adjustable capacitor further comprising a first control electrode (31) and a second control electrode (32) arranged so as to be insulated from the first electrode (21) and the second electrode (22). The first control electrode (31) and the second control electrode (32) are used for providing an electric field to the ferroelectric dielectric layer (1) so as to adjust a dielectric constant of the ferroelectric dielectric layer (1) by means of controlling the electric field strength of the electric field, thereby adjusting a capacitance value between the first electrode (21) and the second electrode (22). Further provided are an impedance-matching apparatus and a semiconductor-processing device. The adjustable capacitor, the impedance-matching apparatus and the semiconductor-processing device can adjust the capacitance value of the adjustable capacitor in milliseconds or even faster, thereby accelerating a matching speed, shortening a matching time, and improving the processing efficiency and processing effect.

Inventors:
WEI, Gang (NO.8 Wenchang Avenue, Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
CHENG, Xiaoyang (NO.8 Wenchang Avenue, Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
Application Number:
CN2017/106668
Publication Date:
December 27, 2018
Filing Date:
October 18, 2017
Export Citation:
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Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. (NO.8 Wenchang Avenue, Beijing Economic-Technological Development Area, Beijing 6, 100176, CN)
International Classes:
H01G7/06
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (Tianshu ZHANG, 10th Floor Tower D, Minsheng Financial Center,28 Jianguomennei Avenue, Dongcheng District, Beijing 5, 100005, CN)
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