ADVANCED PRESSURE TYPE FLOW CONTROL DEVICE

Title:

ADVANCED PRESSURE TYPE FLOW CONTROL DEVICE

Document Type and Number:

WIPO Patent Application WO/2003/058363

Kind Code:

A1

Abstract:

An advanced pressure type flow control device capable of accurately controlling a flow by using an experimental flow expression established to accurately fit to the actual flow of compressible fluid in a non−critical area, wherein the experimental flow expression of the compressible fluid in the non−critical area (non−sound velocity area) is expressed as Qc = KP₂^m (P₁ − P₂)ⁿ, and the fluid flow passing through an orifice (4) is calculated by using the expression Qc = KP₂^m (P₁ − P₂)ⁿ (K is a proportional constant, m and n are constants) so that the flow can be accurately and rapidly controlled to a specified one, and a pressure ratio P₂&sol P₁ = r provided by an upstream side pressure P₁ and a downstream side pressure P₂ is always compared with a critical value r_c and the flow is calculated by using an expression Qc = KP₁ under the critical condition of r ≤ r_c and an expression Qc = KP₂^m (P₁ − P₂)ⁿ under the non−critical condition of r > r_c so that the flow can be accurately and rapidly controlled to the specified one in correspondence to all conditions of the fluid.

Inventors:

OHMI TADAHIRO (JP)
UNO TOMIO (JP)
NAKAMURA OSAMU (JP)
IKEDA NOBUKAZU (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
MATSUMOTO ATSUSHI (JP)
SUGIYAMA KAZUHIKO (JP)
INUI SHUJIRO (JP)
SAKAI TAIJI (JP)
UEYAMA MASANORI (JP)

Application Number:

PCT/JP2002/012250

Publication Date:

July 17, 2003

Filing Date:

November 22, 2002

Export Citation:

Click for automatic bibliography generation Help

Assignee:

FUJIKIN KK (JP)
OHMI TADAHIRO (JP)
TOKYO ELECTRON LTD (JP)
UNO TOMIO (JP)
NAKAMURA OSAMU (JP)
IKEDA NOBUKAZU (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
MATSUMOTO ATSUSHI (JP)
SUGIYAMA KAZUHIKO (JP)
INUI SHUJIRO (JP)
SAKAI TAIJI (JP)
UEYAMA MASANORI (JP)

International Classes:

G01F1/36; G01F1/00; G01F1/42; G05D7/06; (IPC1-7): G05D7/06

Foreign References:

JP2000122725A	2000-04-28
JP2001027556A	2001-01-30
JPH1055218A	1998-02-24
JP2001201376A	2001-07-27
JPH09189586A	1997-07-22

Other References: