Title:
AFM PRECISION MEASUREMENT METHOD FOR THREE-DIMENSIONAL STRUCTURE OF INDEPENDENT NANOSTRUCTURE, NANOSTRUCTURE SCANNING DEVICE HAVING PLURALITY OF AFM PROBES AND SCANNING METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2016/129791
Kind Code:
A1
Abstract:
According to the present invention, provided is an independent nanostructure scanning device having a plurality of AFM probes which have varied resolutions. Such scanning device enables more precise measurement of a nanostructure by confirming the shape and the position of the nanostructure on a specimen by means of high resolution AFM probes and then measuring the three-dimensional shape of the confirmed nanostructure by means of scanning using atomic resolution AFM probes.
Inventors:
LEE JHINHWAN (KR)
SON DONGHYEON (KR)
SON DONGHYEON (KR)
Application Number:
PCT/KR2015/012943
Publication Date:
August 18, 2016
Filing Date:
November 30, 2015
Export Citation:
Assignee:
KOREA ADVANCED INST SCI & TECH (KR)
International Classes:
G01Q10/04; G01Q60/24
Foreign References:
| KR101347557B1 | 2014-01-03 | |||
| JP2002228572A | 2002-08-14 | |||
| JP2002139414A | 2002-05-17 | |||
| JPH07229906A | 1995-08-29 | |||
| US20070289369A1 | 2007-12-20 |
Attorney, Agent or Firm:
FIRSTLAW P.C. (KR)
제일특허법인 (KR)
제일특허법인 (KR)
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