Title:
AG ALLOY FILM FOR REFLECTING ELECTRODE OR WIRING ELECTRODE, REFLECTING ELECTRODE OR WIRING ELECTRODE, AND AG ALLOY SPUTTERING TARGET
Document Type and Number:
WIPO Patent Application WO/2014/208341
Kind Code:
A1
Abstract:
An Ag alloy film used for a reflecting electrode or a wiring electrode, the Ag alloy film exhibiting low electrical resistivity and high reflectivity and having exceptional oxidation resistance under cleaning treatments such as an O2 plasma treatment or UV irradiation, wherein the Ag alloy film contains above 2.0 at% and up to 2.7 at% of In and/or above 2.0 at% and up to 3.5 at% of Zn. The Ag alloy film may further contain 0.01-1.0 at% of Bi.
Inventors:
SHIDA YOKO
GOTO HIROSHI
OCHI MOTOTAKA
GOTO HIROSHI
OCHI MOTOTAKA
Application Number:
PCT/JP2014/065518
Publication Date:
December 31, 2014
Filing Date:
June 11, 2014
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
International Classes:
C23C14/14; C22C5/06; C23C14/34; H01B1/02; H01B5/14; H01L21/28; H01L21/285; H01L51/50; H05B33/26; C22F1/00; C22F1/14
Domestic Patent References:
| WO2009041529A1 | 2009-04-02 |
Foreign References:
| JP2004131747A | 2004-04-30 | |||
| JP2004126497A | 2004-04-22 | |||
| JP2010225586A | 2010-10-07 | |||
| JP2012219308A | 2012-11-12 | |||
| JP2013151735A | 2013-08-08 |
Attorney, Agent or Firm:
HAMADA Yuriko et al. (JP)
Yuriko Hamada (JP)
Yuriko Hamada (JP)
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